Range of heavy ions implanted into solids as measured by He ion backscattering

Author:

Santry D.C.,Werner R.D.

Publisher

Elsevier BV

Subject

General Medicine

Reference12 articles.

1. Range and stopping-power tables for heavy ions

2. Projected range statistics;Gibbons,1975

3. Proc. Int. Conf. on EMIS;Santry,1970

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Improved algorithm for calculation of range and range straggling in ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-11

2. New fitting formulae for simulating nuclear stopping processes;Ion Beam Modification of Materials;1996

3. Projected ranges of energetic ions in solids;Journal of Nuclear Materials;1991-08

4. Depth profiles of implanted 18F, 79Br, and 132Xe in silicon in the energy range 85–600 keV;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-05

5. Range profiles of xenon in aluminum and silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1986-04

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