A generalized Petri net modeling approach for the control of re-entrant flow semiconductor wafer fabrication

Author:

Odrey Nicholas G.,Green Jonathan D.,Appello Adrienne

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,General Mathematics,Software,Control and Systems Engineering

Reference18 articles.

1. Cavalieri S, Mirabella O, Marroccia S. Improving flexible semiconductor manufacturing system performance by a coloured Petri net-based scheduling algorithm. 1997 IEEE Sixth International Conference on Emerging Technologies and Factory Automation proceedings, Los Angeles, CA, September 1997. p. 369–74.

2. Kim J, Desrochers AA. Modeling and analysis of semiconductor manufacturing plants using time Petri net models: COT business case study. IEEE International Conference on Systems, Man, and Cybernetics, vol. 4, Orlando, FL, October 1997. p. 3227–32.

3. Applications of Petri nets in manufacturing systems;Desrochers,1995

4. Petri nets;Murata;Proc. IEEE,1989

5. “Semiconductor Fabrication.” http://cad.bu.edu/simlab/semic.htm [Accessed 4 May 1999].

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