An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films-Reference-Cited by-同舟云学术

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An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films

Published:2006-06 Issue:11-12 Volume:43 Page:3292-3305
ISSN:0020-7683
Container-title:International Journal of Solids and Structures
language:en
Short-container-title:International Journal of Solids and Structures

Author:

Peng B.,Pugno N.,Espinosa H.D.

Publisher

Elsevier BV

Subject

Applied Mathematics,Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Modeling and Simulation

Reference15 articles.

1. Fracture strength of polysilicon at stress concentrations;Bagdahn;Journal of Electromechanical Systems,2003

2. Carpinteri, A., 1997. Structural Mechanics: A Unified Approach. E&FN Spon, 1997.

3. A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy;Chasiotis;Experimental Mechanics,2002

4. Microtensile Tests with the aid of Probe Microscopy for the study of MEMS materials;Chasiotis;SPIE Proceedings,2000

5. Direct measurements of Young’s modulus, Poisson’s ratio and failure properties of ta-C MEMS;Cho;Journal of Micromechanics and Microengineering,2005

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