Delamination in patterned films

Author:

Liu X.H.,Lane M.W.,Shaw T.M.,Simonyi E.

Publisher

Elsevier BV

Subject

Applied Mathematics,Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Modeling and Simulation

Reference14 articles.

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5. Reliability, yield, and performance of a 90nm SOI/Cu/SiCOH technology;Edelstein;Proc. IEEE Int. Intercon. Tech. Conf.,2004

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