Effect of surfactant and electrolyte on surface modification of c-plane GaN substrate using chemical mechanical planarization (CMP) process
Author:
Funder
DST
Publisher
Elsevier BV
Subject
Colloid and Surface Chemistry
Reference33 articles.
1. Candela‐class high‐brightness InGaN/AlGaN double‐heterostructure blue‐light‐emitting diodes;Nakamura;Appl. Phys.Lett.,1994
2. High-brightness InGaN blue, green and yellow light-emitting diodes with quantum well structures;Nakamura;Jpn. J. App. Phys.,1995
3. Temperature activated conductance in GaN/AlGaN heterostructure field effect transistor operating at temperatures up to 300°C;Khan;Appl. Phys. Lett,1985
4. Short wavelength lasers based on GaAs and GaN substrate for DVD and Blu-ray technology;Uchida,2006
5. Chemical mechanical polishing of GaN;Hayashi;J. Electrochem. Soc.,2008
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