Experimental and density functional theory study of benzohydroxamic acid as a corrosion inhibitor in chemical mechanical polishing of Co interconnects-Reference-Cited by-同舟云学术

Experimental and density functional theory study of benzohydroxamic acid as a corrosion inhibitor in chemical mechanical polishing of Co interconnects

Published:2023-03 Issue: Volume:660 Page:130848
ISSN:0927-7757
Container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects
language:en
Short-container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects

Author:

Cao Jingwei,Liu Qi,Xia Rongyang,Pan Guofeng,Hu Lianjun,Qi Yuhang

Publisher

Elsevier BV

Subject

Colloid and Surface Chemistry

Reference56 articles.

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