Author:
Li Dz-Chi,Chen Jeng-Tzong,Chyuan Shiang-Woei,Sun Cherng-Ynan
Subject
Computer Science Applications,Mechanical Engineering,General Materials Science,Modelling and Simulation,Civil and Structural Engineering
Reference9 articles.
1. Extendibility of X-ray lithography to upcoming IC generations;Yanof;Solid-State Technol.,1992
2. A way to 0.1 micron by 1:1 SR lithography;Mochiji;Microelectron. Engng,1992
3. Superconducting compact sources for lithography;Wilson;Rev. Sci. Instrum.,1992
4. Laser plasma sources for proximity printing X-Ray lithography;Chaker;J. Vac. Sci. Technol.,1992
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献