Combined thermo-physical investigations of thin layers with Time Domain Thermoreflectance and Scanning Thermal Microscopy on the example of 500 nm thin, CVD grown tungsten-Reference-Cited by-同舟云学术

Combined thermo-physical investigations of thin layers with Time Domain Thermoreflectance and Scanning Thermal Microscopy on the example of 500 nm thin, CVD grown tungsten

Published:2019-11 Issue: Volume:681 Page:178373
ISSN:0040-6031
Container-title:Thermochimica Acta
language:en
Short-container-title:Thermochimica Acta

Author:

Fladischer Katrin,Leitgeb Verena,Mitterhuber Lisa,Maier Günther A.,Keckes Jozef,Sagmeister Martin,Carniello Sara,Defregger Stefan

Funder

Electronic Components and Systems for European Leadership Joint Undertaking

European Union’s Horizon 2020 research and innovation programme and Germany, Spain, Austria, Belgium, Slovakia

Publisher

Elsevier BV

Subject

Physical and Theoretical Chemistry,Condensed Matter Physics,Instrumentation

Reference44 articles.

1. The drive to miniaturization;Peercy;Nature.,2000

2. Development of Pulsed Light Heating Thermoreflectance Methods Under Configurations of Rear Heating / Front Detection and Front Heating / Front Detection;Baba,2012

3. Thermal microscopy of electronic materials;Heiderhoff;Mater. Sci. Semicond. Process.,2016

4. Quantitative thermometry of nanoscale hot spots;Menges;Nano Lett.,2012

5. Measurement of interfacial thermal resistance by periodic heating and a thermo-reflectance technique;Xu;Mater. Trans.,2007

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electron-phonon coupling dictates electron mean free paths and negative thermal diffusion in metals;Materials Today Chemistry;2024-04

2. High-accuracy thermophysical property measurement technique based on Labview-3ω method;AIP Advances;2023-04-01

3. Measuring thermal properties of thin layers with rough surfaces by using the bidirectional heat flow approach;tm - Technisches Messen;2022-03-03

4. Thermal characterization of morphologically diverse copper phthalocyanine thin layers by scanning thermal microscopy;Ultramicroscopy;2022-03

5. Thermal and spatial resolution in scanning thermal microscopy images: A study on the probe’s heating parameters;Journal of Applied Physics;2021-04-28