Parasitic effect on silicon MEMS resonator model parameters-Reference-Cited by-同舟云学术

Parasitic effect on silicon MEMS resonator model parameters

Published:2007-05 Issue:5-8 Volume:84 Page:1363-1368
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Tanaka Kazuaki,Kihara Ryuji,Sánchez-Amores Ana,Montserrat Josep,Esteve Jaume

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. K. Tanaka et al., in: Proceedings of the 2001 IEICE General Conference, March 2001, C-12-29, p. 124.

2. A. Yajima et al., in: Proceedings of the 2001, Engineering Sciences Society, IEICE Conference, September 2001, C-2-15, p. 39.

3. Frequency-selective MEMS for miniaturized low-power communication devices

4. C.T.-C. Nguyen, in: Proceedings of the 42nd Design Automation Conference, June 2005, pp. 416–420.

5. M.W. Putty, S.C. Chang, R.T. Howe, A.L. Robinson, and K.D. Wise, in: Proceedings of the IEEE Micro Electro Mechanical Systems, February 1989, pp. 60–65.

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