Author:
Zaid H.M.,Manickam M.,Preece J.A.,Palmer R.E.,Robinson A.P.G.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Overview of materials and processes for lithography;Materials and Processes for Next Generation Lithography;2016
2. Negative-tone organic molecular resists;Materials and Processes for Next Generation Lithography;2016