Author:
Silvestre Chantal M.,Nguyen Vy,Jansen Henri,Hansen Ole
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference15 articles.
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5. DREM: infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process;Chang;Microelectron. Eng.,2018
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