Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser-Reference-Cited by-同舟云学术

Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser

Published:2011-09 Issue:9 Volume:88 Page:2908-2912
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Yao Tsung-Fu,Wu Ping-Han,Wu Tzong-Ming,Cheng Chung-Wei,Yang Sen-Yeu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology

2. Hybrid-polymer nanostructures forming an anti-reflection film using two-beam interference and ultraviolet nanoimprint lithography

3. Antireflective nanostructured microlenses

4. Design and fabrication of a microlens array by use of a slow tool servo

5. Gray-scale photolithography using maskless exposure system

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