Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics-Reference-Cited by-同舟云学术

Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics

Published:2010-11 Issue:11 Volume:87 Page:2348-2352
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Chung Gwiy-Sang,Jeong Jae-Min

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

2. Fabrication and characterization of micro-heaters with low-power consumption using SOI membrane and trench structures

3. Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors

4. High temperature degradation of Pt/Ti electrodes in micro-hotplate gas sensors

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