Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Sensor technology strategy in silicon;Sarro;Sens. Actuators A,1992
2. Applications of thermal silicon sensors on membranes;Gajda;Sens. Actuators A,1995
3. L. Qui, E. Obermeier, A. Schubert, A microsensor with integrated heat sink and flow guide for gas flow sensing application, in: Proceedings of the 8th International Conference on Solid-Sate Sensors and Actuators, Stockholm, Sweden, 25–29 June 1995, pp. 520–523.
4. Micromachined thermal radiation emitter from a commercial CMOS process;Parameswaran;IEEE Electron Device Lett.,1991
5. An integrated mass flow sensor with on-chip CMOS interface circuitry;Yoon;IEEE Trans. Electron Devices,1992
Cited by
30 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献