Challenges of integration of high-κ dielectric with III–V materials (Invited Paper)-Reference-Cited by-同舟云学术

Challenges of integration of high-κ dielectric with III–V materials (Invited Paper)

Published:2009-07 Issue:7-9 Volume:86 Page:1540-1543
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Tsai W.,Goel N.,Koveshnikov S.,Majhi P.,Wang W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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