Measurements of current density distribution in shaped e-beam writers-Reference-Cited by-同舟云学术

Measurements of current density distribution in shaped e-beam writers

Published:2016-01 Issue: Volume:149 Page:117-124
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Bok Jan,Horáček Miroslav,Kolařík Vladimír,Urbánek Michal,Matějka Milan,Krzyžánek Vladislav

Funder

Czech Science Foundation

Ministry of Education, Youth and Sports of the Czech Republic

European Commission

Czech Academy of Sciences

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference24 articles.

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2. A new method of experimental investigation of high-power electron beam;Wójcicki;Vacuum,2000

3. Electron-beam diameter measurement using a knife edge with a visor for scattering electrons;Yamazaki;Jpn. J. Appl. Phys.,2003

4. Measurements of variable-shaped electron beams with solid-state detector and scattering aperture;Sakakibara;Jpn. J. Appl. Phys.,2007

5. Current distribution in shaped e-beams;Rao;J. Vac. Sci. Technol.,1981

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