Author:
Maternia Z,Radzimski Z,Borkowicz Z
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Cited by
2 articles.
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1. Measurements of current density distribution in shaped e-beam writers;Microelectronic Engineering;2016-01
2. Modified knife-edge method for current density distribution measurements in e-beam writers;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-05