Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS-Reference-Cited by-同舟云学术

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

Published:2005-10 Issue:2 Volume:82 Page:154-167
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Modafe Alireza,Ghalichechian Nima,Powers Michael,Khbeis Michael,Ghodssi Reza

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference32 articles.

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3. R. Ghodssi, et al., in: Digest Tech. Papers 10th International Conference on Solid-State Sensors and Actuators (Tansducers’99), 1999, pp. 1456–1459.

4. X. Zhang, et al., in: Solid-State Sensor and Actuator Workshop, 2000, pp. 316–319.

5. Fracture analysis of thick plasma-enhanced chemical vapor deposited oxide films for improving the structural integrity of power MEMS

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