Sensitivity of V-shaped atomic force microscope cantilevers based on a modified couple stress theory-Reference-Cited by-同舟云学术

Sensitivity of V-shaped atomic force microscope cantilevers based on a modified couple stress theory

Published:2011-11 Issue:11 Volume:88 Page:3214-3218
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Lee Haw-Long,Chang Win-Jin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference26 articles.

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5. Device for the determination of spring constants of atomic force microscope cantilevers and micromachined springs

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