A micromachined Joule-Thomson cryocooler for ice lithography
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Reference17 articles.
1. Ice lithography for 3D nanofabrication;Zhao;Sci. Bull.,2019
2. Ice-assisted electron-beam lithography for halide perovskite optoelectronic nanodevices;Jin;Nano Energy,2022
3. 3D Nanoprinting by Electron-beam with an ice resist;Wu;ACS Appl. Mater. Interfaces,2022
4. Recording messages on nonplanar objects by cryogenic electron-beam writing;Zheng;Adv. Funct. Mater.,2022
5. Ice-assisted electron-beam lithography for MoS2 transistors with extremely low-energy electrons;Yao;Nanoscale Adv.,2022
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Advancing cryogenic electronic cooling: A case study on embedded manifold microchannels in micromachined Joule-Thomson coolers;Case Studies in Thermal Engineering;2024-09
2. Micromachined Joule–Thomson cooling for long-time and precise thermal management;Review of Scientific Instruments;2024-08-01
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