Nano-porous aluminum oxide membrane as filtration interface for optical gas sensor packaging-Reference-Cited by-同舟云学术

Nano-porous aluminum oxide membrane as filtration interface for optical gas sensor packaging

Published:2018-10 Issue: Volume:198 Page:29-34
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Ma Ying,Kaczynski Jaroslaw,Ranacher Christian,Roshanghias Ali,Zauner Markus,Abasahl Banafsheh^ORCID

Funder

Austrian Smart Systems Integration Research

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

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2. Nano-porous aluminium oxide membranes as cell interfaces;Breuggemann;J. Nanomater.,2013

3. Anodic Aluminum Oxide (AAO) Membranes for Cellular Devices;Ventura,2013

4. Wafer level packaging of micromachined gas sensors;Raible;IEEE Sensors,2006

5. Study of MEMS gas sensor and its packaging;Liu,2015

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