Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes-Reference-Cited by-同舟云学术

Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes

Published:2015-02 Issue: Volume:133 Page:36-44
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Kassegne Sam,Vomero Maria,Gavuglio Roberto,Hirabayashi Mieko,Özyilmaz Emre,Nguyen Sebastien,Rodriguez Jesus,Özyilmaz Eda,van Niekerk Pieter,Khosla Ajit

Funder

National Science Foundation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference46 articles.

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