Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition-Reference-Cited by-同舟云学术

Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition

Published:2009-11 Issue:11 Volume:86 Page:2364-2368
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Chang Jiyoung,Min Byung-Kwon,Kim Jongbaeg,Lin Liwei

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

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4. Cell wall cutting tool and nano-net fabrication by FIB-CVD for subcellular operations and analysis

5. Hybrid platinum/single-wall carbon nanotube nanowire actuators: metallic artificial muscles

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