Fabrication of diamond conditioners by using a micro patterning and electroforming approach-Reference-Cited by-同舟云学术

Fabrication of diamond conditioners by using a micro patterning and electroforming approach

Published:2013-03 Issue: Volume:103 Page:92-98
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Shih Ching-Jui,Lin Wei-Chih,Lin Chao-Sung,Ou Shih-Fu,Pan Yung-Ning

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Investigation of pad deformation and conditioning during the CMP of silicon dioxide films

2. Optical interferometry for surface measurements of CMP pads

3. The effect of the polishing pad treatments on the chemical-mechanical polishing of SiO2 films

4. Conditioning for removal rate stability;Baker,1997

5. Effects of brazing route and brazing alloy on the interfacial structure between diamond and bonding matrix

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