Effect of isopropanol on gold assisted chemical etching of silicon microstructures-Reference-Cited by-同舟云学术

Effect of isopropanol on gold assisted chemical etching of silicon microstructures

Published:2017-06 Issue: Volume:177 Page:59-65
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Romano L.^ORCID,Vila-Comamala J.,Jefimovs K.,Stampanoni M.

Funder

Fondazione Araldi Guinetti

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference45 articles.

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4. Semiconductor Sensors,1994

5. Photonic crystal membrane reflectors by magnetic field-guided metal-assisted chemical etching;Balasundaram;Appl. Phys. Lett.,2013

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