Deep and vertical silicon bulk micromachining using metal assisted chemical etching-Reference-Cited by-同舟云学术

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Deep and vertical silicon bulk micromachining using metal assisted chemical etching

Published:2013-04-03 Issue:5 Volume:23 Page:055015
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zahedinejad Mohammad,Farimani Saeed Delaram,Khaje Mahdi,Mehrara Hamed,Erfanian Alireza,Zeinali Firooz

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/23/i=5/a=055015/pdf

Reference18 articles.

1. Status and trends of silicon RF technology

2. A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell

3. Building up micromuscles

4. Biomedical applications of MEMS

5. Micromachined inertial sensors

Cited by 44 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multistage anisotropic wet etching by KOH for MEMS/NEMS structures;Novel Patterning Technologies 2024;2024-04-09

2. Electroless Displacement Deposition of Noble Metal Nanoparticles and Its Application for Functionalization of Silicon Surface;Journal of the Society of Powder Technology, Japan;2023-12-10

3. Metal-Assisted Chemical Etching Toward Scallop-Free-Sidewall Through-Silicon Vias: A Review;IEEE Transactions on Components, Packaging and Manufacturing Technology;2023-11

4. Metal-Assisted Etching of n-Type and p-Type Silicon Using Patterned Platinum Films: Spatial Distribution of Mesoporous Layer and Open Circuit Potential of Silicon;Journal of The Electrochemical Society;2023-05-01

5. Deep Etching of Silicon Based on Metal-Assisted Chemical Etching;ACS Omega;2022-05-02

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