Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure-Reference-Cited by-同舟云学术

Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure

Published:2015-01 Issue: Volume:131 Page:51-57
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Zhou Xiaofeng,Che Lufeng,Liang Shenglin,Lin Youling,Li Xiaolin,Wang Yuelin

Funder

NSFC

National S&T Major Project of China

NSAF

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Low-noise MEMS vibration sensor for geophysical applications

2. A micro rate gyroscope based on the SAW gyroscopic effect

3. Online motion recognition using an accelerometer in a mobile device

4. A Survey on Wearable Sensor-Based Systems for Health Monitoring and Prognosis

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