Author:
Gibbons F.P.,Manyam J.,Diegoli S.,Manickam M.,Preece J.A.,Palmer R.E.,Robinson A.P.G.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Effect of e-beam dose on the fractional density of Au-catalyzed GaAs nanowire growth;Thin Solid Films;2016-05
2. Photopatternable inorganic hardmask;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11
3. Negative tone molecular resists using cationic polymerization: Comparison of epoxide and oxetane functional groups;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009