FinFETs with ONO BOX for multi-bit unified memory

Author:

Chang Sung-Jae,Bawedin Maryline,Xiong Wade,Lee Jong-Hyun,Lee Jung-Hee,Cristoloveanu Sorin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Advanced SOI MOSFETs with buried alumina and ground plane: self-heating and short-channel effects

2. Handbook of Semiconductor Manufacturing Technology;Cristoloveanu,2007

3. P. Patruno, M. Kostrzewa, K. Landry, W. Xiong, C.R. Cleavelin, Che-Hua Hus, M. Ma, J.-P. Colinge, in: IEEE International SOI Conference, California, USA, 2007.

4. A FinFET memory with remote carrier trapping in ONO buried insulator

5. FinFlash with buried storage ONO layer for flash memory application

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