3D structural templates for UV-NIL fabricated with gray-scale lithography-Reference-Cited by-同舟云学术

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3D structural templates for UV-NIL fabricated with gray-scale lithography

Published:2007-05 Issue:5-8 Volume:84 Page:999-1002
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Kurihara Masaaki,Abe Makoto,Suzuki Katsutoshi,Yoshida Kouji,Shimomura Takeya,Hoga Morihisa,Mohri Hiroshi,Hayashi Naoya

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference4 articles.

1. Nanoimprint lithography of sub-100 nm 3D structures

2. 3D imprint technology using substrate voltage change

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