Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. H. Baltes, O. Brand, A. Hieriemann, D. Lange, C. Hagleitner, in: IEEE International Conference on Micro Electro Mechanical Systems, 2002, pp. 459–466.
2. A novel spiral CMOS compatible micromachined thermoelectric IR microsensor
3. Micromachined thermocouple microwave detector by commercial CMOS fabrication
4. S. Baglio, L. Latorre, P. Nouet, in: IEEE Instrumentation Measurement Technical Conference, 1999, pp. 452–457.
5. Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500/spl deg/C
Cited by
31 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献