Full wafer microstructure fabrication by continuous UV-assisted roller imprinting lithography to enhance light extraction of LEDs-Reference-Cited by-同舟云学术

Full wafer microstructure fabrication by continuous UV-assisted roller imprinting lithography to enhance light extraction of LEDs

Published:2012-03 Issue: Volume:91 Page:64-69
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Lee Yeeu-Chang,Chen Bo-Ting,Wu Tso-Hsiang,Chou Yen-Yu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening

2. Enhanced light output in nitride-based light-emitting diodes by roughening the mesa sidewall

3. Nitride-based light emitting diodes with indium tin oxide electrode patterned by imprint lithography

4. Fabrication of moth-eye structure on p-GaN layer of GaN-based LEDs for improvement of light extraction

5. Enhanced light output from a nitride-based power chip of green light-emitting diodes with nano-rough surface using nanoimprint lithography

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1. Improved light extraction efficiency of complementary metal-oxide semiconductor hot carrier lights sources with the use of improved back-end-of-line light directing structures;Optical Engineering;2019-06-27

2. Hot roller embossing of multi-dimensional microstructures using elastomeric molds;Microsystem Technologies;2017-10-17

3. Roll-to-roll UV imprinting lithography for micro/nanostructures;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11

4. Nanometer scale patterning of GaN using nanoimprint lithography and Inductively Coupled Plasma etching;Microelectronic Engineering;2015-02

5. Micro-cutting with diamond tool micro-patterned by femtosecond laser;International Journal of Precision Engineering and Manufacturing;2014-06