Author:
Doniat François,Anderson Curtis,Dussarrat Christian,McAndrew James,Opila Robert,Wright Beverly,Yang Dan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. G. Dubois, T. Magbitang, W. Volksen, E. Simonyi, R.D. Miller, in: IEEE Int. Interconnect Technol. Conf., Burlingame, CA, June 5–7, 2005, p. 226.
2. A. Grill, D.A. Neumayer, J. Appl. Phys. 94 (2003) 10.
3. Low Dielectric Constant Materials
4. Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献