Investigation of high-resolution contact printing-Reference-Cited by-同舟云学术

Investigation of high-resolution contact printing

Published:2008-05 Issue:5-6 Volume:85 Page:744-748
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Meliorisz B.,Partel S.,Schnattinger T.,Fühner T.,Erdmann A.,Hudek P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Clariant GmbH, D-65203 Wiesbaden, www.clariant.de, distributed by MicroChemicals, www.microchemicals.de.

2. Simulation of mask proximity printing

3. Simulation of proximity and contact lithography

4. Modeling and simulation;Erdmann,2005

5. T. Fühner, T. Schnattinger, G. Ardelean, A. Erdmann, Dr.LiTHO: a development and research lithography simulator, in: Proceedings of SPIE, vol. 6520, 2007.

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