Plasma deposition of parylene-C film-Reference-Cited by-同舟云学术

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Plasma deposition of parylene-C film

Published:2021-03 Issue: Volume:26 Page:101834
ISSN:2352-4928
Container-title:Materials Today Communications
language:en
Short-container-title:Materials Today Communications

Author:

Song Zhiquan,Im Ju-Hee,Ko Hyuk,Park Jun-Hee,Lee Ga-Yeon,Kang Min-Jung,Kim Moo-Hwan,Pyun Jae-Chul

Funder

National Research Foundation of Korea

Publisher

Elsevier BV

Subject

Materials Chemistry,Mechanics of Materials,General Materials Science

Reference58 articles.

1. Recent progress on parylene C polymer for biomedical applications: a review;Golda-Cepa;Prog. Org. Coat.,2020

2. Highly stable flexible organic field-effect transistors with Parylene-C gate dielectrics on a flexible substrate;Kwon;Org. Electron.,2019

3. In situ vapor-deposited parylene substrates for ultra-thin, lightweight organic solar cells;Jean;Org. Electron.,2016

4. Characterization of postfabricated parylene C coatings inside PDMS microdevices;Flueckiger;Sens. Actuators B-Chem.,2011

5. Fabrication of three-dimensional parylene HT diaphragms using D-RIE with a Si substrate;Imai;Sens. Actuators a-Phys.,2017

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Identification of Effects of Parylene-C Coating on Electrospun Fibers;Fibers;2024-08-22

2. Waterproofing a Thermally Actuated Vibrational MEMS Viscosity Sensor;Actuators;2024-02-02

3. Electrochemical analysis of total phospholipids in human serum for severe sepsis diagnosis;Talanta;2024-02

4. New coating with superior corrosion and wear performances: Parylene C/CrN duplex coating;Journal of Vacuum Science & Technology B;2023-10-16

5. The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range;IEEE Sensors Journal;2023-10-01

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