The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range-Reference-Cited by-同舟云学术

The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range

Published:2023-10-01 Issue:19 Volume:23 Page:22277-22284
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Kurnaz Sedat¹,Öztürk Özgür²,Yılmaz Nurdane³^ORCID,Çiçek Osman²^ORCID

Affiliation:

1. Central Research Laboratory, Kastamonu University, Kastamonu, Turkey

2. Department of Electrical and Electronic Engineering, Kastamonu University, Kastamonu, Turkey

3. Department of Mathematics and Science Education, Kastamonu University, Kastamonu, Turkey

Funder

Turkish Scientific and Technological Research Council, TUBITAK, through the 1001 Project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10269339/10224850.pdf?arnumber=10224850

Reference49 articles.

1. PVA tactile sensors based on Electrical Contact Resistance (ECR) change mechanism for subtle pressure detection

2. Design of a piezoelectric based tactile sensor with bio-inspired micro/nano-pillars;koç;Tribology Int,2013

3. Parylene-C as a new piezoelectric material;kim,2013

4. Anti‐icing polyimide thin film with microcolumns fabricated by RIE with cooling and PCVD

5. A Polyimide Based Force Sensor Fabricated Using Additive Screen-Printing Process for Flexible Electronics

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1. High pressure sensor based on intensity-variation using polymer optical fiber;Scientific Reports;2024-08-10

2. Flexible capacitive and piezoresistive pressure sensors based on screen-printed parylene C/polyurethane composites in low-pressure range;Flexible and Printed Electronics;2023-09-01