Sensitivity in nanomechanical pedestal MEMS cantilever-Reference-Cited by-同舟云学术

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Sensitivity in nanomechanical pedestal MEMS cantilever

Published:2024-03 Issue: Volume:38 Page:107891
ISSN:2352-4928
Container-title:Materials Today Communications
language:en
Short-container-title:Materials Today Communications

Author:

Rajak Abhay K.,Dash Ritambhara,Kumari Ashwini,Bhattacharyya A.S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Mechanics of Materials,General Materials Science

Reference66 articles.

1. NEMS sensors based on novel nanomaterials;Yadav,2022

2. Tip-based nanofabrication for NEMS devices;Pu,2022

3. N. Kim, M/NEM devices and uncertainty quantification, PhD thesis. Graduate College of the University of Illinois at Urbana-Champaign, 2018.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Soft g-C3N4 phases in amorphous CNx coatings;Chemical Physics Impact;2024-06

2. Cracks at shallow nanoindentation depths in titanium diboride hard thin coatings used in AFM nanoindentation;Metallurgical Research & Technology;2024

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