Author:
Mellé S.,De Conto D.,Mazenq L.,Dubuc D.,Poussard B.,Bordas C.,Grenier K.,Bary L.,Vendier O.,Muraro J.L.,Cazaux J.L.,Plana R.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
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4. Mellé S, Flourens F, Dubuc D, Grenier K, Pons P, Muraro JL. et al. Investigation of dielectric degradation of microwave capacitive microswitches. IEEE MEMS 2004.
5. Van Spengen WM, Puers Robert, Mertens Robert, DeWolf I. Experimental characterization of stiction due to charging in RF MEMS. IEDM, 2002.
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