Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations

Author:

van Spengen W M

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 76 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation;Sensors;2023-10-09

2. Implementation of an accelerated electrical ageing protocol for Capacitive Micromachined Ultrasonic Transducers (CMUT);2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

3. Design and simulation of a low pull-in voltage RF MEMS switch in series for X-band;2023 IEEE 3rd International Conference on Information Technology, Big Data and Artificial Intelligence (ICIBA);2023-05-26

4. Combinatorial experiments for discovering Al-C thin films with high strength and ductility;International Journal of Plasticity;2023-02

5. Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding;Journal of Microelectromechanical Systems;2022-08

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