Statistical simulation of random dopant induced threshold voltage fluctuations for 35nm channel length MOSFET

Author:

Kovac Urban,Reid Dave,Millar Campbell,Roy Gareth,Roy Scott,Asenov Asen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. International Technology Roadmap for Semiconductors. .

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3. Simulation of intrinsic parameter fluctuations in decananometre and nanometre scale MOSFETs;Asenov;IEEE Trans Electron Dev,2003

4. Experimental study of threshold voltage fluctuation due to statistical variation of channel dopant number in MOSFETs;Mizuno;IEEE Trans Electron Dev,1994

5. Stolk PA, Klaasen DBM. The effect of statistical dopant fluctuations on MOS device performance. In: IEDM Tech Dig; 1996. p. 627–30.

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