Author:
Kim Jong-Seok,Lee Sang-Woo,Jung Kyu-Dong,Kim Woon-Bae,Choa Sung-Hoon,Ju Byeong-Kwon
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Micromachined inertial sensors;Yazdi;Proc lEEE,1998
2. New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes;Geiger;Sens Actuator,1998
3. Single-chip surface micromachined integrated gyroscope with a deviation;Gee;IEEE J Solid-State Circ,2002
4. Adams S, Groves J, Shaw K, Davis T, Cardarelli D. A single-crystal silicon gyroscope with decoupled drive and sense. In: SPlE conference on micromachined devices and components V, vol. 3879. Santa Clara, California; September 1999. p. 74–81.
5. A new micromachined gyoscope with digital output;Lang,2003
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