Flexible stop and double-cascaded stop to improve shock reliability of MEMS accelerometer-Reference-Cited by-同舟云学术

Flexible stop and double-cascaded stop to improve shock reliability of MEMS accelerometer

Published:2014-06 Issue:6-7 Volume:54 Page:1328-1337
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Tao Yong-Kang,Liu Yun-Feng,Dong Jing-Xin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

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5. Multi-scale analysis of MEMS sensors subject to drop impacts;Mariani;Sensors,2007

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