Author:
Zaghloul U.,Koutsoureli M.,Wang H.,Coccetti F.,Papaioannou G.,Pons P.,Plana R.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
2. Vandershueren J, Casiot J, Braunlich P, editors. Berlin, vol. 37. Germany: Springer-Verlag; 1979 [chapter 4].
3. van Turnhout J. In: Sessler GM, editor. Topics in applied physics: electrets, vol. 33. Springer-Verlag, Berlin; 1987, p. 81–216 [chapter 3].
4. Yuan X, Hwang JCM, Forehand Da, Goldsmith CL. In: International microwave symposium; 2005. p. 753–6.
5. Voltage and temperature effect on dielectric charging for RF-MEMS capacitive switches reliability investigation
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