Zero-Level Packaged RF-MEMS Switched Capacitors on Glass Substrates
Author:
Funder
French Ministry of Defense
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/8982100/08896923.pdf?arnumber=8896923
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4. Drift of MEMS Capacitive Accelerometers for One-Year Room-Temperature Storage: A Simulation and Experimental Study;IEEE Sensors Journal;2023-01-01
5. Modeling and Measurement of Thermal–Mechanical-Stress-Creep Effect for RF MEMS Switch Up to 200 °C;Micromachines;2022-01-22
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