Parametric system-level models for position-control of novel electromagnetic free flight microactuator-Reference-Cited by-同舟云学术

Parametric system-level models for position-control of novel electromagnetic free flight microactuator

Published:2021-04 Issue: Volume:119 Page:114062
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Schütz Arwed,Olbrich Michael,Hu Siyang,Ament Christoph,Bechtold Tamara

Funder

German Research Foundation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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