Self-heating aware EM reliability prediction of advanced CMOS technology by kinetic Monte Carlo method

Author:

Cai Linlin,Chen Wangyong,Huang Peng,Liu Xiaoyan,Zhao Yudi,Zhang Xing

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Future on-chip interconnect metallization and electromigration;Hu;IRPS,2018

2. Interconnect trend for single digit nodes;Naik;IEDM Tech Dig,2018

3. Mechanisms of electromigration damage in Cu interconnects;Hu;IEDM Tech Dig,2018

4. Reliability study on cobalt and ruthenium as alternative metals for advanced interconnects;Varela Pedreira;IRPS,2017

5. Cobalt bottom-up contact and via prefill enabling advanced logic and DRAM technologies;van der Veen;IITC,2015

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