Parameters extraction of hafnium based gate oxide capacitors

Author:

Nguyen T.,Busseret C.,Militaru L.,Poncet A.,Aimé D.,Baboux N.,Plossu C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Aime D, Froment B, Cacho F, Carron V, Descombes S, Morand Y, et al. Work function tuning through dopant scanning and related effects in Ni fully silicided gate for sub-45nm nodes CMOS. In: Proceedings of international electron devices meeting, IEDM, 2004. p. 87–90.

2. Busseret C, Baboux N, Plossu C, Poncet A. Ultra fast full quantum capacitance–voltage calculations of mos capacitors. In: Proceedings of ULIS – 7th European workshop on ultimate integration of silicon – Grenoble, ULIS, 2006. p. 169–72.

3. A model for tunneling current in multi-layer tunnel dielectrics;Govoreanu;Solid-State Electron,2003

4. Exact solution of the Schrodinger equation across an arbitrary one-dimensional piecewise-linear potential barrier;Wayne W;J Appl Phys,1986

5. Militaru L, Weber O, Muller M, Ducroquet F, Dusciac D, Plossu C, et al. Study of electrically active defects in high mobility HfO2 MOSFETs. In: Proceedings of the 34th European solid-state device research conference, ESSDERC, 2004. p. 181–4.

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