Cobalt titanium nitride amorphous metal alloys by atomic layer deposition-Reference-Cited by-同舟云学术

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Cobalt titanium nitride amorphous metal alloys by atomic layer deposition

Published:2018-03 Issue: Volume:737 Page:684-692
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Nam Taewook,Lee Chang Wan,Cheon Taehoon,Lee Woo Jae,Kim Soo-Hyun,Kwon Se-Hun,Lee Han-Bo-Ram,Kim Hyungjun

Funder

National Research Foundation of Korea (NRF)

Ministry of Education

MSIP: Ministry of Science, ICT and Future Planning

Korea Evaluation Institute of Industrial Technology (KEIT)

Ministry of Trade, Industry and Energy (MOTIE)

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference86 articles.

1. Atomic layer deposition of nanostructured materials for energy and environmental applications;Marichy;Adv. Mater.,2012

2. The use of atomic layer deposition in advanced nanopatterning;Mackus;Nanoscale,2014

3. Characteristics and applications of plasma enhanced-atomic layer deposition;Kim;Thin Solid Films,2011

4. Atomic layer deposition of metal and nitride thin films: current research efforts and applications for semiconductor device processing;Kim;J. Vac. Sci. Technol. B Microelectron. Nanom. Struct.,2003

5. Applications of atomic layer deposition to nanofabrication and emerging nanodevices;Kim;Thin Solid Films,2009

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1. Impact of the Figures of Merit (FoMs) Definitions on the Variability in Nanowire TFET: NEGF Simulation Study;IEEE Transactions on Electron Devices;2022-11

2. Atomic layer deposition for nonconventional nanomaterials and their applications;Journal of Materials Research;2019-11-27

3. Nitrogen-doped CoOx/carbon nanotubes derived by plasma-enhanced atomic layer deposition: Efficient bifunctional electrocatalyst for oxygen reduction and evolution reactions;Electrochimica Acta;2019-02

4. Editors' Choice—Review—Cobalt Thin Films: Trends in Processing Technologies and Emerging Applications;ECS Journal of Solid State Science and Technology;2019

5. Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review;Chemistry of Materials;2018-12-10

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