Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review-Reference-Cited by-同舟云学术

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Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review

Published:2018-12-10 Issue:4 Volume:31 Page:1142-1183
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Mackus Adriaan J. M.¹²^ORCID,Schneider Joel R.¹^ORCID,MacIsaac Callisto³,Baker Jon G.¹^ORCID,Bent Stacey F.¹^ORCID

Affiliation:

1. Department of Chemical Engineering, Stanford University, Stanford, California 94305, United States

2. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

3. Department of Chemistry, Stanford University, Stanford, California 94305, United States

Funder

Division of Graduate Education

U.S. Department of Energy

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.8b02878

Reference502 articles.

1. A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

2. Industrial Applications of Atomic Layer Deposition

3. Catalyst Design with Atomic Layer Deposition

4. Nanoengineering Heterogeneous Catalysts by Atomic Layer Deposition

5. Emerging Applications of Atomic Layer Deposition for Lithium-Ion Battery Studies

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