Author:
Park Bo-Eun,Oh Il-Kwon,Mahata Chandreswar,Lee Chang Wan,Thompson David,Lee Han-Bo-Ram,Maeng Wan Joo,Kim Hyungjun
Funder
National Research Foundation of Korea
Kementerian Pendidikan Malaysia
Ministry of Science, ICT and Future Planning
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference60 articles.
1. International Technology Roadmap for Semiconductors,2011
2. Atomic layer deposition of ZrO2 on W for metal - insulator–metal cpapacitor application;Lee;Appl. Phys. Lett.,2003
3. Effect of UV lamp irradiation during oxidation of Zr/Pt/Si structure on electrical properties of Pt/ZrO2/Pt/Si structure;Bae;Appl. Surf. Sci.,2010
4. A new TDDB lifetime Bi-model for eDRAM MIM capacitor with ZrO2 high-k dielectrics;Chang,2008
5. Investigation of zirconium oxide based high-k dielectrics for future memory applications;Grube,2009
Cited by
41 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献